JPS57162370U - - Google Patents
Info
- Publication number
- JPS57162370U JPS57162370U JP4543181U JP4543181U JPS57162370U JP S57162370 U JPS57162370 U JP S57162370U JP 4543181 U JP4543181 U JP 4543181U JP 4543181 U JP4543181 U JP 4543181U JP S57162370 U JPS57162370 U JP S57162370U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Rolls And Other Rotary Bodies (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4543181U JPS6111225Y2 (https=) | 1981-04-01 | 1981-04-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4543181U JPS6111225Y2 (https=) | 1981-04-01 | 1981-04-01 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57162370U true JPS57162370U (https=) | 1982-10-13 |
| JPS6111225Y2 JPS6111225Y2 (https=) | 1986-04-09 |
Family
ID=29842323
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4543181U Expired JPS6111225Y2 (https=) | 1981-04-01 | 1981-04-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6111225Y2 (https=) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6213571A (ja) * | 1985-07-11 | 1987-01-22 | Nisshin Steel Co Ltd | 片面連続真空蒸着方法 |
| JP2020094276A (ja) * | 2018-12-06 | 2020-06-18 | 株式会社カネカ | シール装置、真空装置、成膜装置、及びフィルム製造方法 |
| JP2021080529A (ja) * | 2019-11-20 | 2021-05-27 | 株式会社カネカ | シール装置、真空装置、成膜装置及び多層フィルム製造方法 |
-
1981
- 1981-04-01 JP JP4543181U patent/JPS6111225Y2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6213571A (ja) * | 1985-07-11 | 1987-01-22 | Nisshin Steel Co Ltd | 片面連続真空蒸着方法 |
| JP2020094276A (ja) * | 2018-12-06 | 2020-06-18 | 株式会社カネカ | シール装置、真空装置、成膜装置、及びフィルム製造方法 |
| JP2021080529A (ja) * | 2019-11-20 | 2021-05-27 | 株式会社カネカ | シール装置、真空装置、成膜装置及び多層フィルム製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6111225Y2 (https=) | 1986-04-09 |