JPS57162370U - - Google Patents

Info

Publication number
JPS57162370U
JPS57162370U JP4543181U JP4543181U JPS57162370U JP S57162370 U JPS57162370 U JP S57162370U JP 4543181 U JP4543181 U JP 4543181U JP 4543181 U JP4543181 U JP 4543181U JP S57162370 U JPS57162370 U JP S57162370U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4543181U
Other languages
Japanese (ja)
Other versions
JPS6111225Y2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4543181U priority Critical patent/JPS6111225Y2/ja
Publication of JPS57162370U publication Critical patent/JPS57162370U/ja
Application granted granted Critical
Publication of JPS6111225Y2 publication Critical patent/JPS6111225Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Rolls And Other Rotary Bodies (AREA)
  • Physical Vapour Deposition (AREA)
JP4543181U 1981-04-01 1981-04-01 Expired JPS6111225Y2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4543181U JPS6111225Y2 (cg-RX-API-DMAC7.html) 1981-04-01 1981-04-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4543181U JPS6111225Y2 (cg-RX-API-DMAC7.html) 1981-04-01 1981-04-01

Publications (2)

Publication Number Publication Date
JPS57162370U true JPS57162370U (cg-RX-API-DMAC7.html) 1982-10-13
JPS6111225Y2 JPS6111225Y2 (cg-RX-API-DMAC7.html) 1986-04-09

Family

ID=29842323

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4543181U Expired JPS6111225Y2 (cg-RX-API-DMAC7.html) 1981-04-01 1981-04-01

Country Status (1)

Country Link
JP (1) JPS6111225Y2 (cg-RX-API-DMAC7.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6213571A (ja) * 1985-07-11 1987-01-22 Nisshin Steel Co Ltd 片面連続真空蒸着方法
JP2020094276A (ja) * 2018-12-06 2020-06-18 株式会社カネカ シール装置、真空装置、成膜装置、及びフィルム製造方法
JP2021080529A (ja) * 2019-11-20 2021-05-27 株式会社カネカ シール装置、真空装置、成膜装置及び多層フィルム製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6213571A (ja) * 1985-07-11 1987-01-22 Nisshin Steel Co Ltd 片面連続真空蒸着方法
JP2020094276A (ja) * 2018-12-06 2020-06-18 株式会社カネカ シール装置、真空装置、成膜装置、及びフィルム製造方法
JP2021080529A (ja) * 2019-11-20 2021-05-27 株式会社カネカ シール装置、真空装置、成膜装置及び多層フィルム製造方法

Also Published As

Publication number Publication date
JPS6111225Y2 (cg-RX-API-DMAC7.html) 1986-04-09

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