JPS571586B2 - - Google Patents
Info
- Publication number
- JPS571586B2 JPS571586B2 JP5826774A JP5826774A JPS571586B2 JP S571586 B2 JPS571586 B2 JP S571586B2 JP 5826774 A JP5826774 A JP 5826774A JP 5826774 A JP5826774 A JP 5826774A JP S571586 B2 JPS571586 B2 JP S571586B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5826774A JPS571586B2 (en:Method) | 1974-05-22 | 1974-05-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5826774A JPS571586B2 (en:Method) | 1974-05-22 | 1974-05-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50149591A JPS50149591A (en:Method) | 1975-11-29 |
| JPS571586B2 true JPS571586B2 (en:Method) | 1982-01-12 |
Family
ID=13079380
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5826774A Expired JPS571586B2 (en:Method) | 1974-05-22 | 1974-05-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS571586B2 (en:Method) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017014278A1 (ja) * | 2015-07-21 | 2017-01-26 | 住友重機械工業株式会社 | 成膜装置 |
| JP6584982B2 (ja) * | 2015-07-21 | 2019-10-02 | 住友重機械工業株式会社 | 成膜装置 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS549592B2 (en:Method) * | 1972-07-29 | 1979-04-25 | ||
| JPS5062181A (en:Method) * | 1973-10-05 | 1975-05-28 |
-
1974
- 1974-05-22 JP JP5826774A patent/JPS571586B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS50149591A (en:Method) | 1975-11-29 |