JPS57154768U - - Google Patents
Info
- Publication number
- JPS57154768U JPS57154768U JP4252081U JP4252081U JPS57154768U JP S57154768 U JPS57154768 U JP S57154768U JP 4252081 U JP4252081 U JP 4252081U JP 4252081 U JP4252081 U JP 4252081U JP S57154768 U JPS57154768 U JP S57154768U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4252081U JPS57154768U (ja) | 1981-03-25 | 1981-03-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4252081U JPS57154768U (ja) | 1981-03-25 | 1981-03-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57154768U true JPS57154768U (ja) | 1982-09-29 |
Family
ID=29839553
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4252081U Pending JPS57154768U (ja) | 1981-03-25 | 1981-03-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57154768U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63277758A (ja) * | 1987-05-11 | 1988-11-15 | Matsushita Electric Ind Co Ltd | マグネトロンスパッタリング装置 |
-
1981
- 1981-03-25 JP JP4252081U patent/JPS57154768U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63277758A (ja) * | 1987-05-11 | 1988-11-15 | Matsushita Electric Ind Co Ltd | マグネトロンスパッタリング装置 |