JPS57154039A - Gas detecting element - Google Patents

Gas detecting element

Info

Publication number
JPS57154039A
JPS57154039A JP3876081A JP3876081A JPS57154039A JP S57154039 A JPS57154039 A JP S57154039A JP 3876081 A JP3876081 A JP 3876081A JP 3876081 A JP3876081 A JP 3876081A JP S57154039 A JPS57154039 A JP S57154039A
Authority
JP
Japan
Prior art keywords
metal oxide
oxide semiconductor
gas
detecting element
al2o3
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3876081A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0121900B2 (enrdf_load_stackoverflow
Inventor
Masayuki Shiratori
Masaki Katsura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP3876081A priority Critical patent/JPS57154039A/ja
Publication of JPS57154039A publication Critical patent/JPS57154039A/ja
Publication of JPH0121900B2 publication Critical patent/JPH0121900B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP3876081A 1981-03-19 1981-03-19 Gas detecting element Granted JPS57154039A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3876081A JPS57154039A (en) 1981-03-19 1981-03-19 Gas detecting element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3876081A JPS57154039A (en) 1981-03-19 1981-03-19 Gas detecting element

Publications (2)

Publication Number Publication Date
JPS57154039A true JPS57154039A (en) 1982-09-22
JPH0121900B2 JPH0121900B2 (enrdf_load_stackoverflow) 1989-04-24

Family

ID=12534234

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3876081A Granted JPS57154039A (en) 1981-03-19 1981-03-19 Gas detecting element

Country Status (1)

Country Link
JP (1) JPS57154039A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0121900B2 (enrdf_load_stackoverflow) 1989-04-24

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