JPS57153995U - - Google Patents
Info
- Publication number
- JPS57153995U JPS57153995U JP4034381U JP4034381U JPS57153995U JP S57153995 U JPS57153995 U JP S57153995U JP 4034381 U JP4034381 U JP 4034381U JP 4034381 U JP4034381 U JP 4034381U JP S57153995 U JPS57153995 U JP S57153995U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Muffle Furnaces And Rotary Kilns (AREA)
- Furnace Details (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4034381U JPS638128Y2 (https=) | 1981-03-24 | 1981-03-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4034381U JPS638128Y2 (https=) | 1981-03-24 | 1981-03-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57153995U true JPS57153995U (https=) | 1982-09-27 |
| JPS638128Y2 JPS638128Y2 (https=) | 1988-03-10 |
Family
ID=29837457
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4034381U Expired JPS638128Y2 (https=) | 1981-03-24 | 1981-03-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS638128Y2 (https=) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63132424A (ja) * | 1986-11-25 | 1988-06-04 | Nec Kyushu Ltd | 拡散炉装置 |
| JPS63199414A (ja) * | 1987-02-14 | 1988-08-17 | Dainippon Screen Mfg Co Ltd | 基板の熱処理装置 |
-
1981
- 1981-03-24 JP JP4034381U patent/JPS638128Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63132424A (ja) * | 1986-11-25 | 1988-06-04 | Nec Kyushu Ltd | 拡散炉装置 |
| JPS63199414A (ja) * | 1987-02-14 | 1988-08-17 | Dainippon Screen Mfg Co Ltd | 基板の熱処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS638128Y2 (https=) | 1988-03-10 |