JPS57153995U - - Google Patents

Info

Publication number
JPS57153995U
JPS57153995U JP4034381U JP4034381U JPS57153995U JP S57153995 U JPS57153995 U JP S57153995U JP 4034381 U JP4034381 U JP 4034381U JP 4034381 U JP4034381 U JP 4034381U JP S57153995 U JPS57153995 U JP S57153995U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4034381U
Other languages
Japanese (ja)
Other versions
JPS638128Y2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4034381U priority Critical patent/JPS638128Y2/ja
Publication of JPS57153995U publication Critical patent/JPS57153995U/ja
Application granted granted Critical
Publication of JPS638128Y2 publication Critical patent/JPS638128Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Muffle Furnaces And Rotary Kilns (AREA)
  • Furnace Details (AREA)
JP4034381U 1981-03-24 1981-03-24 Expired JPS638128Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4034381U JPS638128Y2 (cs) 1981-03-24 1981-03-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4034381U JPS638128Y2 (cs) 1981-03-24 1981-03-24

Publications (2)

Publication Number Publication Date
JPS57153995U true JPS57153995U (cs) 1982-09-27
JPS638128Y2 JPS638128Y2 (cs) 1988-03-10

Family

ID=29837457

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4034381U Expired JPS638128Y2 (cs) 1981-03-24 1981-03-24

Country Status (1)

Country Link
JP (1) JPS638128Y2 (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63132424A (ja) * 1986-11-25 1988-06-04 Nec Kyushu Ltd 拡散炉装置
JPS63199414A (ja) * 1987-02-14 1988-08-17 Dainippon Screen Mfg Co Ltd 基板の熱処理装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63132424A (ja) * 1986-11-25 1988-06-04 Nec Kyushu Ltd 拡散炉装置
JPS63199414A (ja) * 1987-02-14 1988-08-17 Dainippon Screen Mfg Co Ltd 基板の熱処理装置

Also Published As

Publication number Publication date
JPS638128Y2 (cs) 1988-03-10

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