JPS57153995U - - Google Patents

Info

Publication number
JPS57153995U
JPS57153995U JP4034381U JP4034381U JPS57153995U JP S57153995 U JPS57153995 U JP S57153995U JP 4034381 U JP4034381 U JP 4034381U JP 4034381 U JP4034381 U JP 4034381U JP S57153995 U JPS57153995 U JP S57153995U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4034381U
Other languages
Japanese (ja)
Other versions
JPS638128Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4034381U priority Critical patent/JPS638128Y2/ja
Publication of JPS57153995U publication Critical patent/JPS57153995U/ja
Application granted granted Critical
Publication of JPS638128Y2 publication Critical patent/JPS638128Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Muffle Furnaces And Rotary Kilns (AREA)
  • Furnace Details (AREA)
JP4034381U 1981-03-24 1981-03-24 Expired JPS638128Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4034381U JPS638128Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-03-24 1981-03-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4034381U JPS638128Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-03-24 1981-03-24

Publications (2)

Publication Number Publication Date
JPS57153995U true JPS57153995U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1982-09-27
JPS638128Y2 JPS638128Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-03-10

Family

ID=29837457

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4034381U Expired JPS638128Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-03-24 1981-03-24

Country Status (1)

Country Link
JP (1) JPS638128Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63132424A (ja) * 1986-11-25 1988-06-04 Nec Kyushu Ltd 拡散炉装置
JPS63199414A (ja) * 1987-02-14 1988-08-17 Dainippon Screen Mfg Co Ltd 基板の熱処理装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63132424A (ja) * 1986-11-25 1988-06-04 Nec Kyushu Ltd 拡散炉装置
JPS63199414A (ja) * 1987-02-14 1988-08-17 Dainippon Screen Mfg Co Ltd 基板の熱処理装置

Also Published As

Publication number Publication date
JPS638128Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-03-10

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