JPS57146329U - - Google Patents
Info
- Publication number
- JPS57146329U JPS57146329U JP3293681U JP3293681U JPS57146329U JP S57146329 U JPS57146329 U JP S57146329U JP 3293681 U JP3293681 U JP 3293681U JP 3293681 U JP3293681 U JP 3293681U JP S57146329 U JPS57146329 U JP S57146329U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Drying Of Semiconductors (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3293681U JPS6339960Y2 (https=) | 1981-03-09 | 1981-03-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3293681U JPS6339960Y2 (https=) | 1981-03-09 | 1981-03-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57146329U true JPS57146329U (https=) | 1982-09-14 |
| JPS6339960Y2 JPS6339960Y2 (https=) | 1988-10-19 |
Family
ID=29830315
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3293681U Expired JPS6339960Y2 (https=) | 1981-03-09 | 1981-03-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6339960Y2 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002537644A (ja) * | 1999-02-18 | 2002-11-05 | エムケイエス インスツルメンツ，インコーポレイテッド | 真空ポンプラインにおける重合ｔｅｏｓ堆積抑制のための方法及び装置 |
-
1981
- 1981-03-09 JP JP3293681U patent/JPS6339960Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002537644A (ja) * | 1999-02-18 | 2002-11-05 | エムケイエス インスツルメンツ，インコーポレイテッド | 真空ポンプラインにおける重合ｔｅｏｓ堆積抑制のための方法及び装置 |
| JP4828024B2 (ja) * | 1999-02-18 | 2011-11-30 | エムケイエス インスツルメンツ，インコーポレイテッド | 真空ポンプライン中の重合ｔｅｏｓ堆積抑制のための方法及びｔｅｏｓトラップ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6339960Y2 (https=) | 1988-10-19 |