JPS5714488B2 - - Google Patents

Info

Publication number
JPS5714488B2
JPS5714488B2 JP7039076A JP7039076A JPS5714488B2 JP S5714488 B2 JPS5714488 B2 JP S5714488B2 JP 7039076 A JP7039076 A JP 7039076A JP 7039076 A JP7039076 A JP 7039076A JP S5714488 B2 JPS5714488 B2 JP S5714488B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7039076A
Other languages
Japanese (ja)
Other versions
JPS52153770A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7039076A priority Critical patent/JPS52153770A/ja
Publication of JPS52153770A publication Critical patent/JPS52153770A/ja
Publication of JPS5714488B2 publication Critical patent/JPS5714488B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
JP7039076A 1976-06-17 1976-06-17 Flow rate measuring apparatus for vacuum pump Granted JPS52153770A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7039076A JPS52153770A (en) 1976-06-17 1976-06-17 Flow rate measuring apparatus for vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7039076A JPS52153770A (en) 1976-06-17 1976-06-17 Flow rate measuring apparatus for vacuum pump

Publications (2)

Publication Number Publication Date
JPS52153770A JPS52153770A (en) 1977-12-21
JPS5714488B2 true JPS5714488B2 (enrdf_load_stackoverflow) 1982-03-25

Family

ID=13430058

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7039076A Granted JPS52153770A (en) 1976-06-17 1976-06-17 Flow rate measuring apparatus for vacuum pump

Country Status (1)

Country Link
JP (1) JPS52153770A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108443135B (zh) * 2018-05-19 2019-09-24 江苏新克医疗器械有限公司 一种真空泵性能综合测试系统及方法

Also Published As

Publication number Publication date
JPS52153770A (en) 1977-12-21

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