JPS52153770A - Flow rate measuring apparatus for vacuum pump - Google Patents
Flow rate measuring apparatus for vacuum pumpInfo
- Publication number
- JPS52153770A JPS52153770A JP7039076A JP7039076A JPS52153770A JP S52153770 A JPS52153770 A JP S52153770A JP 7039076 A JP7039076 A JP 7039076A JP 7039076 A JP7039076 A JP 7039076A JP S52153770 A JPS52153770 A JP S52153770A
- Authority
- JP
- Japan
- Prior art keywords
- flow rate
- vacuum pump
- measuring apparatus
- rate measuring
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7039076A JPS52153770A (en) | 1976-06-17 | 1976-06-17 | Flow rate measuring apparatus for vacuum pump |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7039076A JPS52153770A (en) | 1976-06-17 | 1976-06-17 | Flow rate measuring apparatus for vacuum pump |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52153770A true JPS52153770A (en) | 1977-12-21 |
JPS5714488B2 JPS5714488B2 (en) | 1982-03-25 |
Family
ID=13430058
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7039076A Granted JPS52153770A (en) | 1976-06-17 | 1976-06-17 | Flow rate measuring apparatus for vacuum pump |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52153770A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108443135A (en) * | 2018-05-19 | 2018-08-24 | 芜湖筱笙机电科技有限公司 | A kind of vacuum pump integrated test system for performance and method |
-
1976
- 1976-06-17 JP JP7039076A patent/JPS52153770A/en active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108443135A (en) * | 2018-05-19 | 2018-08-24 | 芜湖筱笙机电科技有限公司 | A kind of vacuum pump integrated test system for performance and method |
CN108443135B (en) * | 2018-05-19 | 2019-09-24 | 江苏新克医疗器械有限公司 | A kind of vacuum pump integrated test system for performance and method |
Also Published As
Publication number | Publication date |
---|---|
JPS5714488B2 (en) | 1982-03-25 |
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