JPS52153770A - Flow rate measuring apparatus for vacuum pump - Google Patents

Flow rate measuring apparatus for vacuum pump

Info

Publication number
JPS52153770A
JPS52153770A JP7039076A JP7039076A JPS52153770A JP S52153770 A JPS52153770 A JP S52153770A JP 7039076 A JP7039076 A JP 7039076A JP 7039076 A JP7039076 A JP 7039076A JP S52153770 A JPS52153770 A JP S52153770A
Authority
JP
Japan
Prior art keywords
flow rate
vacuum pump
measuring apparatus
rate measuring
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7039076A
Other languages
Japanese (ja)
Other versions
JPS5714488B2 (en
Inventor
Hideomi Harada
Kouzou Komatsu
Ehide Fusayasu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP7039076A priority Critical patent/JPS52153770A/en
Publication of JPS52153770A publication Critical patent/JPS52153770A/en
Publication of JPS5714488B2 publication Critical patent/JPS5714488B2/ja
Granted legal-status Critical Current

Links

JP7039076A 1976-06-17 1976-06-17 Flow rate measuring apparatus for vacuum pump Granted JPS52153770A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7039076A JPS52153770A (en) 1976-06-17 1976-06-17 Flow rate measuring apparatus for vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7039076A JPS52153770A (en) 1976-06-17 1976-06-17 Flow rate measuring apparatus for vacuum pump

Publications (2)

Publication Number Publication Date
JPS52153770A true JPS52153770A (en) 1977-12-21
JPS5714488B2 JPS5714488B2 (en) 1982-03-25

Family

ID=13430058

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7039076A Granted JPS52153770A (en) 1976-06-17 1976-06-17 Flow rate measuring apparatus for vacuum pump

Country Status (1)

Country Link
JP (1) JPS52153770A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108443135A (en) * 2018-05-19 2018-08-24 芜湖筱笙机电科技有限公司 A kind of vacuum pump integrated test system for performance and method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108443135A (en) * 2018-05-19 2018-08-24 芜湖筱笙机电科技有限公司 A kind of vacuum pump integrated test system for performance and method
CN108443135B (en) * 2018-05-19 2019-09-24 江苏新克医疗器械有限公司 A kind of vacuum pump integrated test system for performance and method

Also Published As

Publication number Publication date
JPS5714488B2 (en) 1982-03-25

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