JPS5714021B2 - - Google Patents
Info
- Publication number
- JPS5714021B2 JPS5714021B2 JP928376A JP928376A JPS5714021B2 JP S5714021 B2 JPS5714021 B2 JP S5714021B2 JP 928376 A JP928376 A JP 928376A JP 928376 A JP928376 A JP 928376A JP S5714021 B2 JPS5714021 B2 JP S5714021B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Physical Vapour Deposition (AREA)
- Hall/Mr Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP928376A JPS5293269A (en) | 1976-02-02 | 1976-02-02 | Doping method for impurity in vapour deposited semiconductor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP928376A JPS5293269A (en) | 1976-02-02 | 1976-02-02 | Doping method for impurity in vapour deposited semiconductor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5293269A JPS5293269A (en) | 1977-08-05 |
| JPS5714021B2 true JPS5714021B2 (me) | 1982-03-20 |
Family
ID=11716136
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP928376A Granted JPS5293269A (en) | 1976-02-02 | 1976-02-02 | Doping method for impurity in vapour deposited semiconductor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5293269A (me) |
-
1976
- 1976-02-02 JP JP928376A patent/JPS5293269A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5293269A (en) | 1977-08-05 |