JPS57139774U - - Google Patents

Info

Publication number
JPS57139774U
JPS57139774U JP2529181U JP2529181U JPS57139774U JP S57139774 U JPS57139774 U JP S57139774U JP 2529181 U JP2529181 U JP 2529181U JP 2529181 U JP2529181 U JP 2529181U JP S57139774 U JPS57139774 U JP S57139774U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2529181U
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2529181U priority Critical patent/JPS57139774U/ja
Publication of JPS57139774U publication Critical patent/JPS57139774U/ja
Pending legal-status Critical Current

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  • Preventing Unauthorised Actuation Of Valves (AREA)
JP2529181U 1981-02-26 1981-02-26 Pending JPS57139774U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2529181U JPS57139774U (ja) 1981-02-26 1981-02-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2529181U JPS57139774U (ja) 1981-02-26 1981-02-26

Publications (1)

Publication Number Publication Date
JPS57139774U true JPS57139774U (ja) 1982-09-01

Family

ID=29822991

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2529181U Pending JPS57139774U (ja) 1981-02-26 1981-02-26

Country Status (1)

Country Link
JP (1) JPS57139774U (ja)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53137673A (en) * 1977-05-03 1978-12-01 Massachusetts Inst Technology Device for and method of matching plate position
JPS54101676A (en) * 1978-01-16 1979-08-10 Rca Corp Method of and device for aligning photo mask
JPS5617017A (en) * 1979-07-20 1981-02-18 Nippon Kogaku Kk <Nikon> Positioning device using bidirectional diffraction grating

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53137673A (en) * 1977-05-03 1978-12-01 Massachusetts Inst Technology Device for and method of matching plate position
JPS54101676A (en) * 1978-01-16 1979-08-10 Rca Corp Method of and device for aligning photo mask
JPS5617017A (en) * 1979-07-20 1981-02-18 Nippon Kogaku Kk <Nikon> Positioning device using bidirectional diffraction grating

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