JPS57137466A - Vacuum vapor deposition device - Google Patents

Vacuum vapor deposition device

Info

Publication number
JPS57137466A
JPS57137466A JP2180681A JP2180681A JPS57137466A JP S57137466 A JPS57137466 A JP S57137466A JP 2180681 A JP2180681 A JP 2180681A JP 2180681 A JP2180681 A JP 2180681A JP S57137466 A JPS57137466 A JP S57137466A
Authority
JP
Japan
Prior art keywords
vapor
wall
depositing material
vapor depositing
recovery
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2180681A
Other languages
Japanese (ja)
Inventor
Makoto Nagao
Akira Nahara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Holdings Corp
Original Assignee
Fuji Photo Film Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Photo Film Co Ltd filed Critical Fuji Photo Film Co Ltd
Priority to JP2180681A priority Critical patent/JPS57137466A/en
Publication of JPS57137466A publication Critical patent/JPS57137466A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Abstract

PURPOSE:To perform the recovery and effective use of a vapor depositing material by sticking the vapor flow scattering in unnecessary directions on the wall formed of the same material as the vapor depositing material and utilizing the stuck matter together with the wall material as a vapor depositing material. CONSTITUTION:Plural pieces of blocks 2a, 2b, 2c, etc. of the size at which they can be put in a hearth or crucible are assembled by using a protecting case 3 around a vapor source 1 disposed with a vapor depositing material 1a, to form a wall 2 for recovery, so that the vapor flow directing in unnecessary directions is received by said wall. The wall 2 consists of the same material as the vapor depositing material. After the end of vapor deposition, the wall 2 is disassembled to the blocks 2a, 2b, etc., and the blocks held stuck with the vapor depositing material on the surface are put into the hearth or crucible, and are used as a vapor depositing material. It is also possible to constitute the entire part of the wall for recovery of one piece of plate-like member of the vapor depositing material, to cut this after the end of the vapor deposition and to use the same as a vapor depositing material. By the use of such wall for recovery, the vapor depositing material attaining about 50% is recovered.
JP2180681A 1981-02-17 1981-02-17 Vacuum vapor deposition device Pending JPS57137466A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2180681A JPS57137466A (en) 1981-02-17 1981-02-17 Vacuum vapor deposition device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2180681A JPS57137466A (en) 1981-02-17 1981-02-17 Vacuum vapor deposition device

Publications (1)

Publication Number Publication Date
JPS57137466A true JPS57137466A (en) 1982-08-25

Family

ID=12065289

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2180681A Pending JPS57137466A (en) 1981-02-17 1981-02-17 Vacuum vapor deposition device

Country Status (1)

Country Link
JP (1) JPS57137466A (en)

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