JPS57136162U - - Google Patents
Info
- Publication number
- JPS57136162U JPS57136162U JP2323181U JP2323181U JPS57136162U JP S57136162 U JPS57136162 U JP S57136162U JP 2323181 U JP2323181 U JP 2323181U JP 2323181 U JP2323181 U JP 2323181U JP S57136162 U JPS57136162 U JP S57136162U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981023231U JPS6244453Y2 (https=) | 1981-02-20 | 1981-02-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981023231U JPS6244453Y2 (https=) | 1981-02-20 | 1981-02-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57136162U true JPS57136162U (https=) | 1982-08-25 |
| JPS6244453Y2 JPS6244453Y2 (https=) | 1987-11-24 |
Family
ID=29820995
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1981023231U Expired JPS6244453Y2 (https=) | 1981-02-20 | 1981-02-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6244453Y2 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005197003A (ja) * | 2003-12-26 | 2005-07-21 | Hitachi High-Technologies Corp | サイドエントリ型試料移動機構を備えた荷電粒子線装置 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000016371A1 (en) * | 1998-09-16 | 2000-03-23 | Hitachi, Ltd. | Beam-utilizing equipment |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4999265A (https=) * | 1973-01-25 | 1974-09-19 | ||
| JPS5590044A (en) * | 1978-12-28 | 1980-07-08 | Jeol Ltd | Sample holder for electronic microscope, etc. |
-
1981
- 1981-02-20 JP JP1981023231U patent/JPS6244453Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4999265A (https=) * | 1973-01-25 | 1974-09-19 | ||
| JPS5590044A (en) * | 1978-12-28 | 1980-07-08 | Jeol Ltd | Sample holder for electronic microscope, etc. |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005197003A (ja) * | 2003-12-26 | 2005-07-21 | Hitachi High-Technologies Corp | サイドエントリ型試料移動機構を備えた荷電粒子線装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6244453Y2 (https=) | 1987-11-24 |