JPS57136162U - - Google Patents

Info

Publication number
JPS57136162U
JPS57136162U JP2323181U JP2323181U JPS57136162U JP S57136162 U JPS57136162 U JP S57136162U JP 2323181 U JP2323181 U JP 2323181U JP 2323181 U JP2323181 U JP 2323181U JP S57136162 U JPS57136162 U JP S57136162U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2323181U
Other languages
Japanese (ja)
Other versions
JPS6244453Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981023231U priority Critical patent/JPS6244453Y2/ja
Publication of JPS57136162U publication Critical patent/JPS57136162U/ja
Application granted granted Critical
Publication of JPS6244453Y2 publication Critical patent/JPS6244453Y2/ja
Expired legal-status Critical Current

Links

JP1981023231U 1981-02-20 1981-02-20 Expired JPS6244453Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981023231U JPS6244453Y2 (en) 1981-02-20 1981-02-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981023231U JPS6244453Y2 (en) 1981-02-20 1981-02-20

Publications (2)

Publication Number Publication Date
JPS57136162U true JPS57136162U (en) 1982-08-25
JPS6244453Y2 JPS6244453Y2 (en) 1987-11-24

Family

ID=29820995

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981023231U Expired JPS6244453Y2 (en) 1981-02-20 1981-02-20

Country Status (1)

Country Link
JP (1) JPS6244453Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005197003A (en) * 2003-12-26 2005-07-21 Hitachi High-Technologies Corp Charged particle beam device equipped with side entry type sample moving mechanism

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000016371A1 (en) * 1998-09-16 2000-03-23 Hitachi, Ltd. Beam-utilizing equipment

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4999265A (en) * 1973-01-25 1974-09-19
JPS5590044A (en) * 1978-12-28 1980-07-08 Jeol Ltd Sample holder for electronic microscope, etc.

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4999265A (en) * 1973-01-25 1974-09-19
JPS5590044A (en) * 1978-12-28 1980-07-08 Jeol Ltd Sample holder for electronic microscope, etc.

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005197003A (en) * 2003-12-26 2005-07-21 Hitachi High-Technologies Corp Charged particle beam device equipped with side entry type sample moving mechanism

Also Published As

Publication number Publication date
JPS6244453Y2 (en) 1987-11-24

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