JPS57132966A - Polishing unit of one pass type multi-head plane grinding, polishing automatic machine - Google Patents

Polishing unit of one pass type multi-head plane grinding, polishing automatic machine

Info

Publication number
JPS57132966A
JPS57132966A JP56013846A JP1384681A JPS57132966A JP S57132966 A JPS57132966 A JP S57132966A JP 56013846 A JP56013846 A JP 56013846A JP 1384681 A JP1384681 A JP 1384681A JP S57132966 A JPS57132966 A JP S57132966A
Authority
JP
Japan
Prior art keywords
polishing
type multi
automatic machine
pass type
plane grinding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56013846A
Other languages
Japanese (ja)
Inventor
Koichi Hatano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibayama Kikai Co Ltd
Original Assignee
Shibayama Kikai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shibayama Kikai Co Ltd filed Critical Shibayama Kikai Co Ltd
Priority to JP56013846A priority Critical patent/JPS57132966A/en
Publication of JPS57132966A publication Critical patent/JPS57132966A/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/04—Headstocks; Working-spindles; Features relating thereto
    • B24B41/047—Grinding heads for working on plane surfaces

Abstract

PURPOSE:To conduct grinding, lapping, polishing, and washing of semiconductor wafers simultaneously at a high speed by transferring works in one pass through a multi-shaft high speed polishing machine. CONSTITUTION:Polishing heads 1 are rotated by gears 2 which are engaged with a sun gear 3 for rotation and revolution. The sun gear 3 and a head arms 6 are rotated together. The sun gear 3 are rotated at a speed of 2,000rpm or more, and the polishing heads 1 at 6,000rpm or more to polish works.
JP56013846A 1981-02-03 1981-02-03 Polishing unit of one pass type multi-head plane grinding, polishing automatic machine Pending JPS57132966A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56013846A JPS57132966A (en) 1981-02-03 1981-02-03 Polishing unit of one pass type multi-head plane grinding, polishing automatic machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56013846A JPS57132966A (en) 1981-02-03 1981-02-03 Polishing unit of one pass type multi-head plane grinding, polishing automatic machine

Publications (1)

Publication Number Publication Date
JPS57132966A true JPS57132966A (en) 1982-08-17

Family

ID=11844634

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56013846A Pending JPS57132966A (en) 1981-02-03 1981-02-03 Polishing unit of one pass type multi-head plane grinding, polishing automatic machine

Country Status (1)

Country Link
JP (1) JPS57132966A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7097544B1 (en) 1995-10-27 2006-08-29 Applied Materials Inc. Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion
JP2011079131A (en) * 2009-10-08 2011-04-21 Lg Chem Ltd Float glass polishing system and method
CN110539249A (en) * 2019-09-30 2019-12-06 南通海润机床有限公司 Multi-grinding-wheel grinding head for surface grinding machine

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7097544B1 (en) 1995-10-27 2006-08-29 Applied Materials Inc. Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion
US7238090B2 (en) 1995-10-27 2007-07-03 Applied Materials, Inc. Polishing apparatus having a trough
US7255632B2 (en) 1995-10-27 2007-08-14 Applied Materials, Inc. Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion
US7614939B2 (en) 1995-10-27 2009-11-10 Applied Materials, Inc. Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion
US8079894B2 (en) 1995-10-27 2011-12-20 Applied Materials, Inc. Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion
JP2011079131A (en) * 2009-10-08 2011-04-21 Lg Chem Ltd Float glass polishing system and method
CN110539249A (en) * 2019-09-30 2019-12-06 南通海润机床有限公司 Multi-grinding-wheel grinding head for surface grinding machine
CN110539249B (en) * 2019-09-30 2021-06-25 南通海润机床有限公司 Multi-grinding-wheel grinding head for surface grinding machine

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