JPS57131321U - - Google Patents
Info
- Publication number
- JPS57131321U JPS57131321U JP1714781U JP1714781U JPS57131321U JP S57131321 U JPS57131321 U JP S57131321U JP 1714781 U JP1714781 U JP 1714781U JP 1714781 U JP1714781 U JP 1714781U JP S57131321 U JPS57131321 U JP S57131321U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981017147U JPS6134167Y2 (https=) | 1981-02-12 | 1981-02-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981017147U JPS6134167Y2 (https=) | 1981-02-12 | 1981-02-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57131321U true JPS57131321U (https=) | 1982-08-16 |
| JPS6134167Y2 JPS6134167Y2 (https=) | 1986-10-06 |
Family
ID=29815120
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1981017147U Expired JPS6134167Y2 (https=) | 1981-02-12 | 1981-02-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6134167Y2 (https=) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5391531U (https=) * | 1976-12-24 | 1978-07-26 | ||
| JPS5535214A (en) * | 1978-09-04 | 1980-03-12 | Asahi Chem Ind Co Ltd | Method and device for film-thickness measurement making use of infrared-ray interference |
-
1981
- 1981-02-12 JP JP1981017147U patent/JPS6134167Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5391531U (https=) * | 1976-12-24 | 1978-07-26 | ||
| JPS5535214A (en) * | 1978-09-04 | 1980-03-12 | Asahi Chem Ind Co Ltd | Method and device for film-thickness measurement making use of infrared-ray interference |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6134167Y2 (https=) | 1986-10-06 |