JPS57128142U - - Google Patents
Info
- Publication number
- JPS57128142U JPS57128142U JP1233681U JP1233681U JPS57128142U JP S57128142 U JPS57128142 U JP S57128142U JP 1233681 U JP1233681 U JP 1233681U JP 1233681 U JP1233681 U JP 1233681U JP S57128142 U JPS57128142 U JP S57128142U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1233681U JPS57128142U (enExample) | 1981-02-02 | 1981-02-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1233681U JPS57128142U (enExample) | 1981-02-02 | 1981-02-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57128142U true JPS57128142U (enExample) | 1982-08-10 |
Family
ID=29810451
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1233681U Pending JPS57128142U (enExample) | 1981-02-02 | 1981-02-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57128142U (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59134834A (ja) * | 1983-01-21 | 1984-08-02 | Mitsubishi Electric Corp | 半導体ウエハの洗浄装置 |
| JPS62147734A (ja) * | 1985-12-23 | 1987-07-01 | Toyo Setsubi Kogyo Kk | ウエハのエツチング装置 |
-
1981
- 1981-02-02 JP JP1233681U patent/JPS57128142U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59134834A (ja) * | 1983-01-21 | 1984-08-02 | Mitsubishi Electric Corp | 半導体ウエハの洗浄装置 |
| JPS62147734A (ja) * | 1985-12-23 | 1987-07-01 | Toyo Setsubi Kogyo Kk | ウエハのエツチング装置 |