JPS57122524A - Blanking circuit for electron beam projector - Google Patents

Blanking circuit for electron beam projector

Info

Publication number
JPS57122524A
JPS57122524A JP56008677A JP867781A JPS57122524A JP S57122524 A JPS57122524 A JP S57122524A JP 56008677 A JP56008677 A JP 56008677A JP 867781 A JP867781 A JP 867781A JP S57122524 A JPS57122524 A JP S57122524A
Authority
JP
Japan
Prior art keywords
circuit
current control
control element
blanking
current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56008677A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6217849B2 (enExample
Inventor
Akinori Shibayama
Korehito Matsuda
Kiichi Takamoto
Masahide Okumura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Hitachi Ltd
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Nippon Telegraph and Telephone Corp filed Critical Hitachi Ltd
Priority to JP56008677A priority Critical patent/JPS57122524A/ja
Publication of JPS57122524A publication Critical patent/JPS57122524A/ja
Publication of JPS6217849B2 publication Critical patent/JPS6217849B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/045—Beam blanking or chopping, i.e. arrangements for momentarily interrupting exposure to the discharge

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
JP56008677A 1981-01-23 1981-01-23 Blanking circuit for electron beam projector Granted JPS57122524A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56008677A JPS57122524A (en) 1981-01-23 1981-01-23 Blanking circuit for electron beam projector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56008677A JPS57122524A (en) 1981-01-23 1981-01-23 Blanking circuit for electron beam projector

Publications (2)

Publication Number Publication Date
JPS57122524A true JPS57122524A (en) 1982-07-30
JPS6217849B2 JPS6217849B2 (enExample) 1987-04-20

Family

ID=11699552

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56008677A Granted JPS57122524A (en) 1981-01-23 1981-01-23 Blanking circuit for electron beam projector

Country Status (1)

Country Link
JP (1) JPS57122524A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5106538A (en) * 1987-07-21 1992-04-21 Raychem Corporation Conductive polymer composition
JP2009038705A (ja) * 2007-08-03 2009-02-19 Shindengen Electric Mfg Co Ltd ブランキング回路

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5106538A (en) * 1987-07-21 1992-04-21 Raychem Corporation Conductive polymer composition
JP2009038705A (ja) * 2007-08-03 2009-02-19 Shindengen Electric Mfg Co Ltd ブランキング回路

Also Published As

Publication number Publication date
JPS6217849B2 (enExample) 1987-04-20

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