JPS57121197U - - Google Patents

Info

Publication number
JPS57121197U
JPS57121197U JP684781U JP684781U JPS57121197U JP S57121197 U JPS57121197 U JP S57121197U JP 684781 U JP684781 U JP 684781U JP 684781 U JP684781 U JP 684781U JP S57121197 U JPS57121197 U JP S57121197U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP684781U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP684781U priority Critical patent/JPS57121197U/ja
Publication of JPS57121197U publication Critical patent/JPS57121197U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Framework For Endless Conveyors (AREA)
JP684781U 1981-01-21 1981-01-21 Pending JPS57121197U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP684781U JPS57121197U (enExample) 1981-01-21 1981-01-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP684781U JPS57121197U (enExample) 1981-01-21 1981-01-21

Publications (1)

Publication Number Publication Date
JPS57121197U true JPS57121197U (enExample) 1982-07-28

Family

ID=29805119

Family Applications (1)

Application Number Title Priority Date Filing Date
JP684781U Pending JPS57121197U (enExample) 1981-01-21 1981-01-21

Country Status (1)

Country Link
JP (1) JPS57121197U (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6212509A (ja) * 1985-07-02 1987-01-21 Hitachi Electronics Eng Co Ltd ウェハ搬送装置
KR100847572B1 (ko) 2006-12-13 2008-07-21 세크론 주식회사 반도체제조용 수지이송장치

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6212509A (ja) * 1985-07-02 1987-01-21 Hitachi Electronics Eng Co Ltd ウェハ搬送装置
KR100847572B1 (ko) 2006-12-13 2008-07-21 세크론 주식회사 반도체제조용 수지이송장치

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