JPS57116770U - - Google Patents
Info
- Publication number
- JPS57116770U JPS57116770U JP18281U JP18281U JPS57116770U JP S57116770 U JPS57116770 U JP S57116770U JP 18281 U JP18281 U JP 18281U JP 18281 U JP18281 U JP 18281U JP S57116770 U JPS57116770 U JP S57116770U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18281U JPS57116770U (enExample) | 1981-01-06 | 1981-01-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18281U JPS57116770U (enExample) | 1981-01-06 | 1981-01-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57116770U true JPS57116770U (enExample) | 1982-07-20 |
Family
ID=29798772
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18281U Pending JPS57116770U (enExample) | 1981-01-06 | 1981-01-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57116770U (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013508565A (ja) * | 2009-10-26 | 2013-03-07 | ジェネラル・プラズマ・インコーポレーテッド | ロータリーマグネトロンマグネットバー、およびこれを含む高いターゲット利用のための装置 |
| JP2014122422A (ja) * | 2012-12-21 | 2014-07-03 | Sulzer Metaplas Gmbh | 蒸発源 |
-
1981
- 1981-01-06 JP JP18281U patent/JPS57116770U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013508565A (ja) * | 2009-10-26 | 2013-03-07 | ジェネラル・プラズマ・インコーポレーテッド | ロータリーマグネトロンマグネットバー、およびこれを含む高いターゲット利用のための装置 |
| JP2014122422A (ja) * | 2012-12-21 | 2014-07-03 | Sulzer Metaplas Gmbh | 蒸発源 |