JPS57110947U - - Google Patents
Info
- Publication number
- JPS57110947U JPS57110947U JP18717280U JP18717280U JPS57110947U JP S57110947 U JPS57110947 U JP S57110947U JP 18717280 U JP18717280 U JP 18717280U JP 18717280 U JP18717280 U JP 18717280U JP S57110947 U JPS57110947 U JP S57110947U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18717280U JPS6130282Y2 (ja) | 1980-12-25 | 1980-12-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18717280U JPS6130282Y2 (ja) | 1980-12-25 | 1980-12-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57110947U true JPS57110947U (ja) | 1982-07-09 |
| JPS6130282Y2 JPS6130282Y2 (ja) | 1986-09-05 |
Family
ID=29989755
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18717280U Expired JPS6130282Y2 (ja) | 1980-12-25 | 1980-12-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6130282Y2 (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022176246A (ja) * | 2018-11-20 | 2022-11-25 | 株式会社東京精密 | ウエハ位置決め装置 |
| JP2022176247A (ja) * | 2018-11-20 | 2022-11-25 | 株式会社東京精密 | ウエハ位置決め装置 |
-
1980
- 1980-12-25 JP JP18717280U patent/JPS6130282Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022176246A (ja) * | 2018-11-20 | 2022-11-25 | 株式会社東京精密 | ウエハ位置決め装置 |
| JP2022176247A (ja) * | 2018-11-20 | 2022-11-25 | 株式会社東京精密 | ウエハ位置決め装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6130282Y2 (ja) | 1986-09-05 |