JPS57106808A - Oscillator system film thickness meter - Google Patents

Oscillator system film thickness meter

Info

Publication number
JPS57106808A
JPS57106808A JP18343480A JP18343480A JPS57106808A JP S57106808 A JPS57106808 A JP S57106808A JP 18343480 A JP18343480 A JP 18343480A JP 18343480 A JP18343480 A JP 18343480A JP S57106808 A JPS57106808 A JP S57106808A
Authority
JP
Japan
Prior art keywords
oscillator
film
frequency
thickness
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18343480A
Other languages
Japanese (ja)
Inventor
Shigeru Okamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP18343480A priority Critical patent/JPS57106808A/en
Publication of JPS57106808A publication Critical patent/JPS57106808A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/063—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using piezoelectric resonators
    • G01B7/066—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using piezoelectric resonators for measuring thickness of coating

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)

Abstract

PURPOSE:To measure the thickness of a film with high precision eliminating measuring errors owing to a temperature fluctuation by using an oscillator for measuring the thickness of a film by vapor deposition and an oscillator for compensating temperature. CONSTITUTION:The thickness of a film by vapor deposition is measured by measuring in the heterodyne system the difference in the frequency of two quartz oscillator X1 and X0 connecting a quartz oscillator for measuring the thickness of a film by vapor deposition X1 and an oscillator for compensating temperature X0 to a mixer. When the frequency f1 of the quartz oscillator X1 and the frequency f0 of the quartz oscillator X0 are mixed by the mixer, two frequencies of f0+f1 and f0-f1 come out as an output, out of which only the frequency f0-f1 is taken out as the output.
JP18343480A 1980-12-24 1980-12-24 Oscillator system film thickness meter Pending JPS57106808A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18343480A JPS57106808A (en) 1980-12-24 1980-12-24 Oscillator system film thickness meter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18343480A JPS57106808A (en) 1980-12-24 1980-12-24 Oscillator system film thickness meter

Publications (1)

Publication Number Publication Date
JPS57106808A true JPS57106808A (en) 1982-07-02

Family

ID=16135700

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18343480A Pending JPS57106808A (en) 1980-12-24 1980-12-24 Oscillator system film thickness meter

Country Status (1)

Country Link
JP (1) JPS57106808A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014116791A (en) * 2012-12-10 2014-06-26 Nippon Dempa Kogyo Co Ltd Oscillation device
US20150176129A1 (en) * 2010-11-04 2015-06-25 Canon Kabushiki Kaisha Film formation apparatus and film formation method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150176129A1 (en) * 2010-11-04 2015-06-25 Canon Kabushiki Kaisha Film formation apparatus and film formation method
US9382624B2 (en) * 2010-11-04 2016-07-05 Canon Kabushiki Kaisha Film formation method using oscillators for measurement and calibration during calibration step performed during film formation
JP2014116791A (en) * 2012-12-10 2014-06-26 Nippon Dempa Kogyo Co Ltd Oscillation device

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