JPS57106758U - - Google Patents

Info

Publication number
JPS57106758U
JPS57106758U JP18165980U JP18165980U JPS57106758U JP S57106758 U JPS57106758 U JP S57106758U JP 18165980 U JP18165980 U JP 18165980U JP 18165980 U JP18165980 U JP 18165980U JP S57106758 U JPS57106758 U JP S57106758U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18165980U
Other languages
Japanese (ja)
Other versions
JPS6111222Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18165980U priority Critical patent/JPS6111222Y2/ja
Publication of JPS57106758U publication Critical patent/JPS57106758U/ja
Application granted granted Critical
Publication of JPS6111222Y2 publication Critical patent/JPS6111222Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP18165980U 1980-12-19 1980-12-19 Expired JPS6111222Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18165980U JPS6111222Y2 (enrdf_load_stackoverflow) 1980-12-19 1980-12-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18165980U JPS6111222Y2 (enrdf_load_stackoverflow) 1980-12-19 1980-12-19

Publications (2)

Publication Number Publication Date
JPS57106758U true JPS57106758U (enrdf_load_stackoverflow) 1982-07-01
JPS6111222Y2 JPS6111222Y2 (enrdf_load_stackoverflow) 1986-04-09

Family

ID=29979331

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18165980U Expired JPS6111222Y2 (enrdf_load_stackoverflow) 1980-12-19 1980-12-19

Country Status (1)

Country Link
JP (1) JPS6111222Y2 (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008291361A (ja) * 2007-04-27 2008-12-04 Applied Materials Inc 基板支持体、基板処理装置及び基板の載置方法
KR101161388B1 (ko) 2009-02-26 2012-07-02 가부시키가이샤 재팬 디스프레이 이스트 진공증착장치의 중량판 및 그것을 사용한 진공증착장치
JP2014075436A (ja) * 2012-10-03 2014-04-24 Nissin Ion Equipment Co Ltd 基板ホルダ
JP2021519861A (ja) * 2018-03-29 2021-08-12 エリコン サーフェス ソリューションズ アーゲー、 プフェフィコン 基板の選択的な蒸気コーティングのための装置および方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008291361A (ja) * 2007-04-27 2008-12-04 Applied Materials Inc 基板支持体、基板処理装置及び基板の載置方法
KR101161388B1 (ko) 2009-02-26 2012-07-02 가부시키가이샤 재팬 디스프레이 이스트 진공증착장치의 중량판 및 그것을 사용한 진공증착장치
JP2014075436A (ja) * 2012-10-03 2014-04-24 Nissin Ion Equipment Co Ltd 基板ホルダ
JP2021519861A (ja) * 2018-03-29 2021-08-12 エリコン サーフェス ソリューションズ アーゲー、 プフェフィコン 基板の選択的な蒸気コーティングのための装置および方法

Also Published As

Publication number Publication date
JPS6111222Y2 (enrdf_load_stackoverflow) 1986-04-09

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