JPS5710573B2 - - Google Patents

Info

Publication number
JPS5710573B2
JPS5710573B2 JP7152378A JP7152378A JPS5710573B2 JP S5710573 B2 JPS5710573 B2 JP S5710573B2 JP 7152378 A JP7152378 A JP 7152378A JP 7152378 A JP7152378 A JP 7152378A JP S5710573 B2 JPS5710573 B2 JP S5710573B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7152378A
Other languages
Japanese (ja)
Other versions
JPS54162978A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7152378A priority Critical patent/JPS54162978A/ja
Publication of JPS54162978A publication Critical patent/JPS54162978A/ja
Publication of JPS5710573B2 publication Critical patent/JPS5710573B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
JP7152378A 1978-06-15 1978-06-15 Manufacture of semicinductor device Granted JPS54162978A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7152378A JPS54162978A (en) 1978-06-15 1978-06-15 Manufacture of semicinductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7152378A JPS54162978A (en) 1978-06-15 1978-06-15 Manufacture of semicinductor device

Publications (2)

Publication Number Publication Date
JPS54162978A JPS54162978A (en) 1979-12-25
JPS5710573B2 true JPS5710573B2 (enExample) 1982-02-26

Family

ID=13463162

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7152378A Granted JPS54162978A (en) 1978-06-15 1978-06-15 Manufacture of semicinductor device

Country Status (1)

Country Link
JP (1) JPS54162978A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01150275U (enExample) * 1988-04-08 1989-10-17
JPH01150276U (enExample) * 1988-04-08 1989-10-17

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4569117A (en) * 1984-05-09 1986-02-11 Texas Instruments Incorporated Method of making integrated circuit with reduced narrow-width effect

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01150275U (enExample) * 1988-04-08 1989-10-17
JPH01150276U (enExample) * 1988-04-08 1989-10-17

Also Published As

Publication number Publication date
JPS54162978A (en) 1979-12-25

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