JPS5710569B2 - - Google Patents
Info
- Publication number
- JPS5710569B2 JPS5710569B2 JP3306372A JP3306372A JPS5710569B2 JP S5710569 B2 JPS5710569 B2 JP S5710569B2 JP 3306372 A JP3306372 A JP 3306372A JP 3306372 A JP3306372 A JP 3306372A JP S5710569 B2 JPS5710569 B2 JP S5710569B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Element Separation (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3306372A JPS5710569B2 (en:Method) | 1972-03-31 | 1972-03-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3306372A JPS5710569B2 (en:Method) | 1972-03-31 | 1972-03-31 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56114772A Division JPS57118666A (en) | 1981-07-22 | 1981-07-22 | Complementary mos integrated circuit device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS48101891A JPS48101891A (en:Method) | 1973-12-21 |
| JPS5710569B2 true JPS5710569B2 (en:Method) | 1982-02-26 |
Family
ID=12376264
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3306372A Expired JPS5710569B2 (en:Method) | 1972-03-31 | 1972-03-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5710569B2 (en:Method) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4044454A (en) * | 1975-04-16 | 1977-08-30 | Ibm Corporation | Method for forming integrated circuit regions defined by recessed dielectric isolation |
| JPS58115846A (ja) * | 1981-12-28 | 1983-07-09 | Matsushita Electric Ind Co Ltd | 相補型絶縁ゲ−ト型半導体装置 |
| JPS5955055A (ja) * | 1982-09-24 | 1984-03-29 | Fujitsu Ltd | 半導体装置の製造方法 |
| JP2597990B2 (ja) * | 1986-03-31 | 1997-04-09 | 株式会社東芝 | 相補型半導体装置及びその製造方法 |
| JPS63128659A (ja) * | 1986-11-18 | 1988-06-01 | Seiko Epson Corp | 半導体装置 |
| JPH0165151U (en:Method) * | 1988-09-22 | 1989-04-26 |
-
1972
- 1972-03-31 JP JP3306372A patent/JPS5710569B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS48101891A (en:Method) | 1973-12-21 |