JPS5710235A - Specimen cassette unit for electron beam exposure apparatus - Google Patents

Abstract

PURPOSE:To enable the titled apparatus to be adapted for a substrate of various size and to decrease the weight of a conveying cassette for holding and conveying a specimen by making the cassette cooperate with a specimen holder provided on an exposure table, controlling the position of the specimen, and holding fixedly the specimen. CONSTITUTION:Holding blocks 16a, 16b, one of which is fixed and the other of which is so held as to be altered at an interval to be movable parallel to the one and a position controller 18 are provided on the table 11 of an exposure apparatus, and are disposed in an L shape at the respective upper ends. In a cassette 30, a stationary arm 32 having a position controller 36 at the end and a movable arm 35 are mounted on a base 31, a specimen is placed on the arm 32, 35 adjusted at its interval in response to the size of the specimen, is held by a spring 46, and is thus conveyed onto the table 11. The conveyed specimen is urged by a pressing plate 21 elevationally moved by a cam mechanism onto the L-shaped inner surface of the blocks 16a, 16b and the controller 18, and is held fixedly at the height of exposure reference plane. Thus, a cassette capable of being adapted as the specimen of different size can be simplified and made light-weight.