JPS5697953A - Ion-injection device - Google Patents

Ion-injection device

Info

Publication number
JPS5697953A
JPS5697953A JP17269979A JP17269979A JPS5697953A JP S5697953 A JPS5697953 A JP S5697953A JP 17269979 A JP17269979 A JP 17269979A JP 17269979 A JP17269979 A JP 17269979A JP S5697953 A JPS5697953 A JP S5697953A
Authority
JP
Japan
Prior art keywords
wheel
gear
slanted
frame
respect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17269979A
Other languages
Japanese (ja)
Other versions
JPS6131938B2 (en
Inventor
Tetsuyoshi Kato
Tsuneo Hiramatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP17269979A priority Critical patent/JPS5697953A/en
Publication of JPS5697953A publication Critical patent/JPS5697953A/en
Publication of JPS6131938B2 publication Critical patent/JPS6131938B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3435—Target holders (includes backing plates and endblocks)

Abstract

PURPOSE:To enable a channeling angle to be arbitrarily switched over, while holding the constant vacuum level within a vacuum chamber, by rocking a movable arm which supports a pair of wheel in such a manner that the wheel can freely swing, through an operation from outside the vacuum chamber. CONSTITUTION:If a push bolt 24 is turned by operating it from outside a vacuum room, a rack 23 moves along one of its longitudinal direction. As a result, a gear 21 and 20 are rotated, the gear 20 and a frame 17 which is connected to the gear 20 are totated clockwise or anticlockwise, and a wheel 12 and 13 move around a shaft 19 in the same direction as the rotation of the frame 17. Consequently, the part of a belt that is between the wheel 12 and 13 is slanted with respect to an ionic-path direction P, and thereby wafer comes to be slanted with respect to the direction P.
JP17269979A 1979-12-31 1979-12-31 Ion-injection device Granted JPS5697953A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17269979A JPS5697953A (en) 1979-12-31 1979-12-31 Ion-injection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17269979A JPS5697953A (en) 1979-12-31 1979-12-31 Ion-injection device

Publications (2)

Publication Number Publication Date
JPS5697953A true JPS5697953A (en) 1981-08-07
JPS6131938B2 JPS6131938B2 (en) 1986-07-23

Family

ID=15946702

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17269979A Granted JPS5697953A (en) 1979-12-31 1979-12-31 Ion-injection device

Country Status (1)

Country Link
JP (1) JPS5697953A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04230944A (en) * 1990-04-17 1992-08-19 Applied Materials Inc Broad beam ion implantation and device
WO2021149207A1 (en) * 2020-01-23 2021-07-29 株式会社ハイテム Overturn prevention structure for multi-level poultry cage

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04230944A (en) * 1990-04-17 1992-08-19 Applied Materials Inc Broad beam ion implantation and device
WO2021149207A1 (en) * 2020-01-23 2021-07-29 株式会社ハイテム Overturn prevention structure for multi-level poultry cage

Also Published As

Publication number Publication date
JPS6131938B2 (en) 1986-07-23

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