JPS5694603A - Chrome tantalum nitrogen thin film resistor - Google Patents

Chrome tantalum nitrogen thin film resistor

Info

Publication number
JPS5694603A
JPS5694603A JP17241979A JP17241979A JPS5694603A JP S5694603 A JPS5694603 A JP S5694603A JP 17241979 A JP17241979 A JP 17241979A JP 17241979 A JP17241979 A JP 17241979A JP S5694603 A JPS5694603 A JP S5694603A
Authority
JP
Japan
Prior art keywords
thin film
film resistor
tantalum nitrogen
nitrogen thin
chrome
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17241979A
Other languages
English (en)
Japanese (ja)
Other versions
JPS634322B2 (enrdf_load_stackoverflow
Inventor
Nobuo Yasujima
Natsuo Itokawa
Seiichirou Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TAISEI KOKI KK
Original Assignee
TAISEI KOKI KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TAISEI KOKI KK filed Critical TAISEI KOKI KK
Priority to JP17241979A priority Critical patent/JPS5694603A/ja
Publication of JPS5694603A publication Critical patent/JPS5694603A/ja
Publication of JPS634322B2 publication Critical patent/JPS634322B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Non-Adjustable Resistors (AREA)
JP17241979A 1979-12-27 1979-12-27 Chrome tantalum nitrogen thin film resistor Granted JPS5694603A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17241979A JPS5694603A (en) 1979-12-27 1979-12-27 Chrome tantalum nitrogen thin film resistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17241979A JPS5694603A (en) 1979-12-27 1979-12-27 Chrome tantalum nitrogen thin film resistor

Publications (2)

Publication Number Publication Date
JPS5694603A true JPS5694603A (en) 1981-07-31
JPS634322B2 JPS634322B2 (enrdf_load_stackoverflow) 1988-01-28

Family

ID=15941605

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17241979A Granted JPS5694603A (en) 1979-12-27 1979-12-27 Chrome tantalum nitrogen thin film resistor

Country Status (1)

Country Link
JP (1) JPS5694603A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI401745B (zh) * 2007-07-13 2013-07-11 Hitachi Ltd Semiconductor device and manufacturing method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI401745B (zh) * 2007-07-13 2013-07-11 Hitachi Ltd Semiconductor device and manufacturing method thereof

Also Published As

Publication number Publication date
JPS634322B2 (enrdf_load_stackoverflow) 1988-01-28

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