JPS5694603A - Chrome tantalum nitrogen thin film resistor - Google Patents
Chrome tantalum nitrogen thin film resistorInfo
- Publication number
- JPS5694603A JPS5694603A JP17241979A JP17241979A JPS5694603A JP S5694603 A JPS5694603 A JP S5694603A JP 17241979 A JP17241979 A JP 17241979A JP 17241979 A JP17241979 A JP 17241979A JP S5694603 A JPS5694603 A JP S5694603A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- film resistor
- tantalum nitrogen
- nitrogen thin
- chrome
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 title 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 title 1
- 239000010409 thin film Substances 0.000 title 1
Landscapes
- Physical Vapour Deposition (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Non-Adjustable Resistors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17241979A JPS5694603A (en) | 1979-12-27 | 1979-12-27 | Chrome tantalum nitrogen thin film resistor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17241979A JPS5694603A (en) | 1979-12-27 | 1979-12-27 | Chrome tantalum nitrogen thin film resistor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5694603A true JPS5694603A (en) | 1981-07-31 |
JPS634322B2 JPS634322B2 (enrdf_load_stackoverflow) | 1988-01-28 |
Family
ID=15941605
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17241979A Granted JPS5694603A (en) | 1979-12-27 | 1979-12-27 | Chrome tantalum nitrogen thin film resistor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5694603A (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI401745B (zh) * | 2007-07-13 | 2013-07-11 | Hitachi Ltd | Semiconductor device and manufacturing method thereof |
-
1979
- 1979-12-27 JP JP17241979A patent/JPS5694603A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI401745B (zh) * | 2007-07-13 | 2013-07-11 | Hitachi Ltd | Semiconductor device and manufacturing method thereof |
Also Published As
Publication number | Publication date |
---|---|
JPS634322B2 (enrdf_load_stackoverflow) | 1988-01-28 |
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