JPS5694038U - - Google Patents
Info
- Publication number
- JPS5694038U JPS5694038U JP17625679U JP17625679U JPS5694038U JP S5694038 U JPS5694038 U JP S5694038U JP 17625679 U JP17625679 U JP 17625679U JP 17625679 U JP17625679 U JP 17625679U JP S5694038 U JPS5694038 U JP S5694038U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1979176256U JPS6231972Y2 (enExample) | 1979-12-21 | 1979-12-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1979176256U JPS6231972Y2 (enExample) | 1979-12-21 | 1979-12-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5694038U true JPS5694038U (enExample) | 1981-07-25 |
| JPS6231972Y2 JPS6231972Y2 (enExample) | 1987-08-15 |
Family
ID=29686897
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1979176256U Expired JPS6231972Y2 (enExample) | 1979-12-21 | 1979-12-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6231972Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62113347A (ja) * | 1985-11-11 | 1987-05-25 | Nissin Electric Co Ltd | ウエハ−保持装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5027898U (enExample) * | 1973-07-06 | 1975-03-31 | ||
| JPS5488270U (enExample) * | 1977-12-05 | 1979-06-22 |
-
1979
- 1979-12-21 JP JP1979176256U patent/JPS6231972Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5027898U (enExample) * | 1973-07-06 | 1975-03-31 | ||
| JPS5488270U (enExample) * | 1977-12-05 | 1979-06-22 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62113347A (ja) * | 1985-11-11 | 1987-05-25 | Nissin Electric Co Ltd | ウエハ−保持装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6231972Y2 (enExample) | 1987-08-15 |