JPS5488270U - - Google Patents
Info
- Publication number
- JPS5488270U JPS5488270U JP16215677U JP16215677U JPS5488270U JP S5488270 U JPS5488270 U JP S5488270U JP 16215677 U JP16215677 U JP 16215677U JP 16215677 U JP16215677 U JP 16215677U JP S5488270 U JPS5488270 U JP S5488270U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1977162156U JPS5841722Y2 (ja) | 1977-12-05 | 1977-12-05 | イオン打込用のバックプレ−ト装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1977162156U JPS5841722Y2 (ja) | 1977-12-05 | 1977-12-05 | イオン打込用のバックプレ−ト装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5488270U true JPS5488270U (enExample) | 1979-06-22 |
| JPS5841722Y2 JPS5841722Y2 (ja) | 1983-09-20 |
Family
ID=29157593
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1977162156U Expired JPS5841722Y2 (ja) | 1977-12-05 | 1977-12-05 | イオン打込用のバックプレ−ト装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5841722Y2 (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5648132A (en) * | 1979-09-14 | 1981-05-01 | Eaton Corp | Method and device for thermally conducting vacuum coated article to be treated |
| JPS5694038U (enExample) * | 1979-12-21 | 1981-07-25 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51142277A (en) * | 1975-06-03 | 1976-12-07 | Fujitsu Ltd | Device for electron-beam exposure |
-
1977
- 1977-12-05 JP JP1977162156U patent/JPS5841722Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51142277A (en) * | 1975-06-03 | 1976-12-07 | Fujitsu Ltd | Device for electron-beam exposure |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5648132A (en) * | 1979-09-14 | 1981-05-01 | Eaton Corp | Method and device for thermally conducting vacuum coated article to be treated |
| JPS5694038U (enExample) * | 1979-12-21 | 1981-07-25 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5841722Y2 (ja) | 1983-09-20 |