JPS5691834A - Sealing apparatus - Google Patents
Sealing apparatusInfo
- Publication number
- JPS5691834A JPS5691834A JP16832579A JP16832579A JPS5691834A JP S5691834 A JPS5691834 A JP S5691834A JP 16832579 A JP16832579 A JP 16832579A JP 16832579 A JP16832579 A JP 16832579A JP S5691834 A JPS5691834 A JP S5691834A
- Authority
- JP
- Japan
- Prior art keywords
- moving
- along
- divided
- bellow
- magnet tape
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Drying Of Semiconductors (AREA)
Abstract
PURPOSE: To isolate an atmosphere certainly as well as to exclude driving means for the sealing apparatus by providing a magnet tape to a bellow member arranged in a divided manner along a moving line of a moving member.
CONSTITUTION: By the bellow members 32, 34 which are divided along the moving line of a movable shaft which is the moving member as well as has the magnet tape 30 arranged along divided opposed surfaces, a treating chamber 12 and a mechanism part chamber 14 are partitioned. In order to separate close contact of the magnet tape 30 by left and right release shafts 36, 40 moving along with the movable shaft 18, the movement of the shaft 18 is not inhibited by said bellow members 32, 34 and the atmosphereof the mechanism part 14 and the corrosive atmosphere of the treating chamber are sealed.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16832579A JPS5691834A (en) | 1979-12-26 | 1979-12-26 | Sealing apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16832579A JPS5691834A (en) | 1979-12-26 | 1979-12-26 | Sealing apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5691834A true JPS5691834A (en) | 1981-07-25 |
Family
ID=15865939
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16832579A Pending JPS5691834A (en) | 1979-12-26 | 1979-12-26 | Sealing apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5691834A (en) |
-
1979
- 1979-12-26 JP JP16832579A patent/JPS5691834A/en active Pending
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