JPS5691834A - Sealing apparatus - Google Patents

Sealing apparatus

Info

Publication number
JPS5691834A
JPS5691834A JP16832579A JP16832579A JPS5691834A JP S5691834 A JPS5691834 A JP S5691834A JP 16832579 A JP16832579 A JP 16832579A JP 16832579 A JP16832579 A JP 16832579A JP S5691834 A JPS5691834 A JP S5691834A
Authority
JP
Japan
Prior art keywords
moving
along
divided
bellow
magnet tape
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16832579A
Other languages
Japanese (ja)
Inventor
Minoru Hiroki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP16832579A priority Critical patent/JPS5691834A/en
Publication of JPS5691834A publication Critical patent/JPS5691834A/en
Pending legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Drying Of Semiconductors (AREA)

Abstract

PURPOSE: To isolate an atmosphere certainly as well as to exclude driving means for the sealing apparatus by providing a magnet tape to a bellow member arranged in a divided manner along a moving line of a moving member.
CONSTITUTION: By the bellow members 32, 34 which are divided along the moving line of a movable shaft which is the moving member as well as has the magnet tape 30 arranged along divided opposed surfaces, a treating chamber 12 and a mechanism part chamber 14 are partitioned. In order to separate close contact of the magnet tape 30 by left and right release shafts 36, 40 moving along with the movable shaft 18, the movement of the shaft 18 is not inhibited by said bellow members 32, 34 and the atmosphereof the mechanism part 14 and the corrosive atmosphere of the treating chamber are sealed.
COPYRIGHT: (C)1981,JPO&Japio
JP16832579A 1979-12-26 1979-12-26 Sealing apparatus Pending JPS5691834A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16832579A JPS5691834A (en) 1979-12-26 1979-12-26 Sealing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16832579A JPS5691834A (en) 1979-12-26 1979-12-26 Sealing apparatus

Publications (1)

Publication Number Publication Date
JPS5691834A true JPS5691834A (en) 1981-07-25

Family

ID=15865939

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16832579A Pending JPS5691834A (en) 1979-12-26 1979-12-26 Sealing apparatus

Country Status (1)

Country Link
JP (1) JPS5691834A (en)

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