JPS568492B2 - - Google Patents
Info
- Publication number
- JPS568492B2 JPS568492B2 JP398277A JP398277A JPS568492B2 JP S568492 B2 JPS568492 B2 JP S568492B2 JP 398277 A JP398277 A JP 398277A JP 398277 A JP398277 A JP 398277A JP S568492 B2 JPS568492 B2 JP S568492B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP398277A JPS5389672A (en) | 1977-01-19 | 1977-01-19 | Pattern generator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP398277A JPS5389672A (en) | 1977-01-19 | 1977-01-19 | Pattern generator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5389672A JPS5389672A (en) | 1978-08-07 |
| JPS568492B2 true JPS568492B2 (ja) | 1981-02-24 |
Family
ID=11572233
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP398277A Granted JPS5389672A (en) | 1977-01-19 | 1977-01-19 | Pattern generator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5389672A (ja) |
-
1977
- 1977-01-19 JP JP398277A patent/JPS5389672A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5389672A (en) | 1978-08-07 |