JPS5389672A - Pattern generator - Google Patents

Pattern generator

Info

Publication number
JPS5389672A
JPS5389672A JP398277A JP398277A JPS5389672A JP S5389672 A JPS5389672 A JP S5389672A JP 398277 A JP398277 A JP 398277A JP 398277 A JP398277 A JP 398277A JP S5389672 A JPS5389672 A JP S5389672A
Authority
JP
Japan
Prior art keywords
pattern generator
subject
binary picture
inspection
light source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP398277A
Other languages
Japanese (ja)
Other versions
JPS568492B2 (en
Inventor
Toshimitsu Hamada
Keiichi Okamoto
Seiji Kashioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP398277A priority Critical patent/JPS5389672A/en
Publication of JPS5389672A publication Critical patent/JPS5389672A/en
Publication of JPS568492B2 publication Critical patent/JPS568492B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To perform comparative inspection by newly producing the binary picture through light source conversion of an inspection subject and other standard binary picture to be compared only when said subject is one.
COPYRIGHT: (C)1978,JPO&Japio
JP398277A 1977-01-19 1977-01-19 Pattern generator Granted JPS5389672A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP398277A JPS5389672A (en) 1977-01-19 1977-01-19 Pattern generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP398277A JPS5389672A (en) 1977-01-19 1977-01-19 Pattern generator

Publications (2)

Publication Number Publication Date
JPS5389672A true JPS5389672A (en) 1978-08-07
JPS568492B2 JPS568492B2 (en) 1981-02-24

Family

ID=11572233

Family Applications (1)

Application Number Title Priority Date Filing Date
JP398277A Granted JPS5389672A (en) 1977-01-19 1977-01-19 Pattern generator

Country Status (1)

Country Link
JP (1) JPS5389672A (en)

Also Published As

Publication number Publication date
JPS568492B2 (en) 1981-02-24

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