JPS568491B2 - - Google Patents
Info
- Publication number
- JPS568491B2 JPS568491B2 JP3540376A JP3540376A JPS568491B2 JP S568491 B2 JPS568491 B2 JP S568491B2 JP 3540376 A JP3540376 A JP 3540376A JP 3540376 A JP3540376 A JP 3540376A JP S568491 B2 JPS568491 B2 JP S568491B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3540376A JPS52119080A (en) | 1976-03-31 | 1976-03-31 | Electron beam exposure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3540376A JPS52119080A (en) | 1976-03-31 | 1976-03-31 | Electron beam exposure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52119080A JPS52119080A (en) | 1977-10-06 |
| JPS568491B2 true JPS568491B2 (sl) | 1981-02-24 |
Family
ID=12440932
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3540376A Granted JPS52119080A (en) | 1976-03-31 | 1976-03-31 | Electron beam exposure |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52119080A (sl) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52147977A (en) * | 1976-04-02 | 1977-12-08 | Jeol Ltd | Electronic lens unit |
| JPS5328379A (en) * | 1977-06-22 | 1978-03-16 | Jeol Ltd | Electron lens device |
-
1976
- 1976-03-31 JP JP3540376A patent/JPS52119080A/ja active Granted
Non-Patent Citations (1)
| Title |
|---|
| AN ELECTRON EXPOSURE SYSTEM FOR RECORDING AND PRINTING=1972 * |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52119080A (en) | 1977-10-06 |