JPS568491B2 - - Google Patents
Info
- Publication number
- JPS568491B2 JPS568491B2 JP3540376A JP3540376A JPS568491B2 JP S568491 B2 JPS568491 B2 JP S568491B2 JP 3540376 A JP3540376 A JP 3540376A JP 3540376 A JP3540376 A JP 3540376A JP S568491 B2 JPS568491 B2 JP S568491B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3540376A JPS52119080A (en) | 1976-03-31 | 1976-03-31 | Electron beam exposure |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3540376A JPS52119080A (en) | 1976-03-31 | 1976-03-31 | Electron beam exposure |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52119080A JPS52119080A (en) | 1977-10-06 |
JPS568491B2 true JPS568491B2 (de) | 1981-02-24 |
Family
ID=12440932
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3540376A Granted JPS52119080A (en) | 1976-03-31 | 1976-03-31 | Electron beam exposure |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52119080A (de) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52147977A (en) * | 1976-04-02 | 1977-12-08 | Jeol Ltd | Electronic lens unit |
JPS5328379A (en) * | 1977-06-22 | 1978-03-16 | Jeol Ltd | Electron lens device |
-
1976
- 1976-03-31 JP JP3540376A patent/JPS52119080A/ja active Granted
Non-Patent Citations (1)
Title |
---|
AN ELECTRON EXPOSURE SYSTEM FOR RECORDING AND PRINTING=1972 * |
Also Published As
Publication number | Publication date |
---|---|
JPS52119080A (en) | 1977-10-06 |