JPS568185A - Forming thin layer pattern - Google Patents

Forming thin layer pattern

Info

Publication number
JPS568185A
JPS568185A JP8380979A JP8380979A JPS568185A JP S568185 A JPS568185 A JP S568185A JP 8380979 A JP8380979 A JP 8380979A JP 8380979 A JP8380979 A JP 8380979A JP S568185 A JPS568185 A JP S568185A
Authority
JP
Japan
Prior art keywords
thin layer
layer pattern
forming thin
forming
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8380979A
Other languages
Japanese (ja)
Inventor
Kiyoshi Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP8380979A priority Critical patent/JPS568185A/en
Publication of JPS568185A publication Critical patent/JPS568185A/en
Pending legal-status Critical Current

Links

Landscapes

  • Gas-Filled Discharge Tubes (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
JP8380979A 1979-06-29 1979-06-29 Forming thin layer pattern Pending JPS568185A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8380979A JPS568185A (en) 1979-06-29 1979-06-29 Forming thin layer pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8380979A JPS568185A (en) 1979-06-29 1979-06-29 Forming thin layer pattern

Publications (1)

Publication Number Publication Date
JPS568185A true JPS568185A (en) 1981-01-27

Family

ID=13812985

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8380979A Pending JPS568185A (en) 1979-06-29 1979-06-29 Forming thin layer pattern

Country Status (1)

Country Link
JP (1) JPS568185A (en)

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