JPS56813B2 - - Google Patents
Info
- Publication number
- JPS56813B2 JPS56813B2 JP6841673A JP6841673A JPS56813B2 JP S56813 B2 JPS56813 B2 JP S56813B2 JP 6841673 A JP6841673 A JP 6841673A JP 6841673 A JP6841673 A JP 6841673A JP S56813 B2 JPS56813 B2 JP S56813B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6841673A JPS56813B2 (en) | 1973-06-18 | 1973-06-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6841673A JPS56813B2 (en) | 1973-06-18 | 1973-06-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5017941A JPS5017941A (en) | 1975-02-25 |
| JPS56813B2 true JPS56813B2 (en) | 1981-01-09 |
Family
ID=13373041
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6841673A Expired JPS56813B2 (en) | 1973-06-18 | 1973-06-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56813B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5686546U (en) * | 1979-12-10 | 1981-07-11 | ||
| JPS60218650A (en) * | 1984-04-16 | 1985-11-01 | Canon Inc | Pattern exposure method |
| US5739898A (en) * | 1993-02-03 | 1998-04-14 | Nikon Corporation | Exposure method and apparatus |
-
1973
- 1973-06-18 JP JP6841673A patent/JPS56813B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5017941A (en) | 1975-02-25 |