JPS5681249A - Exhaust reflux device - Google Patents

Exhaust reflux device

Info

Publication number
JPS5681249A
JPS5681249A JP15677079A JP15677079A JPS5681249A JP S5681249 A JPS5681249 A JP S5681249A JP 15677079 A JP15677079 A JP 15677079A JP 15677079 A JP15677079 A JP 15677079A JP S5681249 A JPS5681249 A JP S5681249A
Authority
JP
Japan
Prior art keywords
negative pressure
diaphragm
chamber
passage
pressure chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15677079A
Other languages
Japanese (ja)
Inventor
Teruo Takayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15677079A priority Critical patent/JPS5681249A/en
Publication of JPS5681249A publication Critical patent/JPS5681249A/en
Pending legal-status Critical Current

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  • Exhaust-Gas Circulating Devices (AREA)

Abstract

PURPOSE: To attempt to realize compactness of the whole device, by incorporating an exhaust refulx valve and a control valve which controls negative pressure signals led to a negative pressure operating chamber, resulting in no need of the piping to connect to both.
CONSTITUTION: The first diaphragm 74 is installed in a casing 72, and a negative pressure chamber 76 on the upper side is communicated through a passage 80 with a negative pressure port 46. On the diaphragm 74 is supported a hollow movable member 82 in which the second and third diapragms 84, 86 are installed being connected to each other with a connecting member 88. Thus, the second negative pressure chamber 90 is formed on the upper side of the diaphram 84, a control chamber 92 formed between the diaphragms 84, 86 and an exhaust pressure chamber 94 formed on the lower side of the diaphragm 86. Said control chamber 92 is communicated through a passage 118 with the first negative pressure chamber 76, and a seal member 120 is installed at the third diaphragm 86, contronting the opening area of the passage 118.
COPYRIGHT: (C)1981,JPO&Japio
JP15677079A 1979-12-05 1979-12-05 Exhaust reflux device Pending JPS5681249A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15677079A JPS5681249A (en) 1979-12-05 1979-12-05 Exhaust reflux device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15677079A JPS5681249A (en) 1979-12-05 1979-12-05 Exhaust reflux device

Publications (1)

Publication Number Publication Date
JPS5681249A true JPS5681249A (en) 1981-07-03

Family

ID=15634927

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15677079A Pending JPS5681249A (en) 1979-12-05 1979-12-05 Exhaust reflux device

Country Status (1)

Country Link
JP (1) JPS5681249A (en)

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