JPS568105B2 - - Google Patents

Info

Publication number
JPS568105B2
JPS568105B2 JP3604772A JP3604772A JPS568105B2 JP S568105 B2 JPS568105 B2 JP S568105B2 JP 3604772 A JP3604772 A JP 3604772A JP 3604772 A JP3604772 A JP 3604772A JP S568105 B2 JPS568105 B2 JP S568105B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3604772A
Other languages
Japanese (ja)
Other versions
JPS48103088A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3604772A priority Critical patent/JPS568105B2/ja
Publication of JPS48103088A publication Critical patent/JPS48103088A/ja
Publication of JPS568105B2 publication Critical patent/JPS568105B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP3604772A 1972-04-12 1972-04-12 Expired JPS568105B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3604772A JPS568105B2 (en) 1972-04-12 1972-04-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3604772A JPS568105B2 (en) 1972-04-12 1972-04-12

Publications (2)

Publication Number Publication Date
JPS48103088A JPS48103088A (en) 1973-12-24
JPS568105B2 true JPS568105B2 (en) 1981-02-21

Family

ID=12458783

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3604772A Expired JPS568105B2 (en) 1972-04-12 1972-04-12

Country Status (1)

Country Link
JP (1) JPS568105B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2908288B1 (en) * 1979-03-03 1980-01-17 Heraeus Schott Quarzschmelze Quartz glass bell for semiconductor technology purposes
JPS59220916A (en) * 1983-05-31 1984-12-12 Toshiba Corp Vapor phase growing method and device therefor
JPS6390828U (en) * 1986-12-03 1988-06-13

Also Published As

Publication number Publication date
JPS48103088A (en) 1973-12-24

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