JPS5679933A - Method and means for measuring vacuum - Google Patents

Method and means for measuring vacuum

Info

Publication number
JPS5679933A
JPS5679933A JP16316080A JP16316080A JPS5679933A JP S5679933 A JPS5679933 A JP S5679933A JP 16316080 A JP16316080 A JP 16316080A JP 16316080 A JP16316080 A JP 16316080A JP S5679933 A JPS5679933 A JP S5679933A
Authority
JP
Japan
Prior art keywords
measuring vacuum
vacuum
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16316080A
Other languages
English (en)
Other versions
JPS6348014B2 (ja
Inventor
Emu Peeteitsuchi Ronarudo
Dei Buriguria Donarudo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of JPS5679933A publication Critical patent/JPS5679933A/ja
Publication of JPS6348014B2 publication Critical patent/JPS6348014B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G01L21/32—Vacuum gauges by making use of ionisation effects using electric discharge tubes with thermionic cathodes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP16316080A 1979-11-19 1980-11-19 Method and means for measuring vacuum Granted JPS5679933A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/095,406 US4314205A (en) 1979-11-19 1979-11-19 Method and means for vacuum gauging

Publications (2)

Publication Number Publication Date
JPS5679933A true JPS5679933A (en) 1981-06-30
JPS6348014B2 JPS6348014B2 (ja) 1988-09-27

Family

ID=22251842

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16316080A Granted JPS5679933A (en) 1979-11-19 1980-11-19 Method and means for measuring vacuum

Country Status (2)

Country Link
US (1) US4314205A (ja)
JP (1) JPS5679933A (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0746074B2 (ja) * 1984-11-27 1995-05-17 日電アネルバ株式会社 真空計
GB8603999D0 (en) * 1986-02-18 1986-03-26 Vg Instr Group Vacuum monitoring apparatus
JPS62218834A (ja) * 1986-03-20 1987-09-26 Seiko Instr & Electronics Ltd 気体圧力計
US4967157A (en) * 1988-08-29 1990-10-30 Mks Instruments, Inc. Method and circuit for extending the range of a cold cathode discharge vacuum gauge
US9105428B2 (en) * 2010-08-09 2015-08-11 Chol Min Pak Method of extinguishing an electric arc in a low or high voltage switchgear by pulse discharge

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL253877A (ja) * 1960-07-15
US3399341A (en) * 1965-05-24 1968-08-27 United Aircraft Corp Vacuum pressure measurement apparatus utlizing hollow cathode discharge
US3394286A (en) * 1965-05-27 1968-07-23 Nat Res Corp Ultrahigh vacuum measuring ionization gauge
US3495165A (en) * 1967-02-13 1970-02-10 Gen Electric Vacuum device gas measurement apparatus and method

Also Published As

Publication number Publication date
US4314205A (en) 1982-02-02
JPS6348014B2 (ja) 1988-09-27

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