JPS5678244U - - Google Patents
Info
- Publication number
- JPS5678244U JPS5678244U JP15518779U JP15518779U JPS5678244U JP S5678244 U JPS5678244 U JP S5678244U JP 15518779 U JP15518779 U JP 15518779U JP 15518779 U JP15518779 U JP 15518779U JP S5678244 U JPS5678244 U JP S5678244U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15518779U JPS5678244U (ja) | 1979-11-07 | 1979-11-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15518779U JPS5678244U (ja) | 1979-11-07 | 1979-11-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5678244U true JPS5678244U (ja) | 1981-06-25 |
Family
ID=29667285
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15518779U Pending JPS5678244U (ja) | 1979-11-07 | 1979-11-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5678244U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6099531U (ja) * | 1983-12-12 | 1985-07-06 | 東京エレクトロン相模株式会社 | ウエハーホルダ |
-
1979
- 1979-11-07 JP JP15518779U patent/JPS5678244U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6099531U (ja) * | 1983-12-12 | 1985-07-06 | 東京エレクトロン相模株式会社 | ウエハーホルダ |