JPS567742B2 - - Google Patents
Info
- Publication number
- JPS567742B2 JPS567742B2 JP8754473A JP8754473A JPS567742B2 JP S567742 B2 JPS567742 B2 JP S567742B2 JP 8754473 A JP8754473 A JP 8754473A JP 8754473 A JP8754473 A JP 8754473A JP S567742 B2 JPS567742 B2 JP S567742B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Coating Apparatus (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8754473A JPS567742B2 (de) | 1973-08-06 | 1973-08-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8754473A JPS567742B2 (de) | 1973-08-06 | 1973-08-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5036534A JPS5036534A (de) | 1975-04-05 |
| JPS567742B2 true JPS567742B2 (de) | 1981-02-19 |
Family
ID=13917910
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8754473A Expired JPS567742B2 (de) | 1973-08-06 | 1973-08-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS567742B2 (de) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55120038A (en) * | 1979-03-10 | 1980-09-16 | Pioneer Electronic Corp | Resist coating and developing device |
| JPS5872486A (ja) * | 1981-10-28 | 1983-04-30 | Nec Corp | 印字装置 |
| JPS58103132A (ja) * | 1981-12-16 | 1983-06-20 | Konishiroku Photo Ind Co Ltd | スピンナ−装置 |
| JPS58217184A (ja) * | 1982-06-09 | 1983-12-17 | 三菱電機株式会社 | ウエハ乾燥装置 |
| JPH0236276Y2 (de) * | 1985-01-10 | 1990-10-03 | ||
| JPS61236543A (ja) * | 1985-04-12 | 1986-10-21 | Internatl Rectifier Corp Japan Ltd | フオトレジスト塗布装置 |
| JPS62156382U (de) * | 1986-03-22 | 1987-10-05 | ||
| JPS63136523A (ja) * | 1986-11-27 | 1988-06-08 | Nec Yamagata Ltd | 半導体製造装置 |
-
1973
- 1973-08-06 JP JP8754473A patent/JPS567742B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5036534A (de) | 1975-04-05 |