JPS567632B2 - - Google Patents

Info

Publication number
JPS567632B2
JPS567632B2 JP9417373A JP9417373A JPS567632B2 JP S567632 B2 JPS567632 B2 JP S567632B2 JP 9417373 A JP9417373 A JP 9417373A JP 9417373 A JP9417373 A JP 9417373A JP S567632 B2 JPS567632 B2 JP S567632B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9417373A
Other languages
Japanese (ja)
Other versions
JPS5044726A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9417373A priority Critical patent/JPS567632B2/ja
Publication of JPS5044726A publication Critical patent/JPS5044726A/ja
Publication of JPS567632B2 publication Critical patent/JPS567632B2/ja
Expired legal-status Critical Current

Links

JP9417373A 1973-08-22 1973-08-22 Expired JPS567632B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9417373A JPS567632B2 (en) 1973-08-22 1973-08-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9417373A JPS567632B2 (en) 1973-08-22 1973-08-22

Publications (2)

Publication Number Publication Date
JPS5044726A JPS5044726A (en) 1975-04-22
JPS567632B2 true JPS567632B2 (en) 1981-02-18

Family

ID=14102938

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9417373A Expired JPS567632B2 (en) 1973-08-22 1973-08-22

Country Status (1)

Country Link
JP (1) JPS567632B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3060875B2 (en) * 1994-04-08 2000-07-10 日本電気株式会社 Optoelectronic device, circuit pattern forming method, and optical diffraction grating forming method

Also Published As

Publication number Publication date
JPS5044726A (en) 1975-04-22

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