JPS567439Y2 - - Google Patents

Info

Publication number
JPS567439Y2
JPS567439Y2 JP12904675U JP12904675U JPS567439Y2 JP S567439 Y2 JPS567439 Y2 JP S567439Y2 JP 12904675 U JP12904675 U JP 12904675U JP 12904675 U JP12904675 U JP 12904675U JP S567439 Y2 JPS567439 Y2 JP S567439Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12904675U
Other languages
Japanese (ja)
Other versions
JPS5242476U (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12904675U priority Critical patent/JPS567439Y2/ja
Publication of JPS5242476U publication Critical patent/JPS5242476U/ja
Application granted granted Critical
Publication of JPS567439Y2 publication Critical patent/JPS567439Y2/ja
Expired legal-status Critical Current

Links

JP12904675U 1975-09-20 1975-09-20 Expired JPS567439Y2 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12904675U JPS567439Y2 (ko) 1975-09-20 1975-09-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12904675U JPS567439Y2 (ko) 1975-09-20 1975-09-20

Publications (2)

Publication Number Publication Date
JPS5242476U JPS5242476U (ko) 1977-03-25
JPS567439Y2 true JPS567439Y2 (ko) 1981-02-18

Family

ID=28609377

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12904675U Expired JPS567439Y2 (ko) 1975-09-20 1975-09-20

Country Status (1)

Country Link
JP (1) JPS567439Y2 (ko)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7138813B2 (en) 1999-06-30 2006-11-21 Cascade Microtech, Inc. Probe station thermal chuck with shielding for capacitive current
US7355420B2 (en) 2001-08-21 2008-04-08 Cascade Microtech, Inc. Membrane probing system
US7420381B2 (en) 2004-09-13 2008-09-02 Cascade Microtech, Inc. Double sided probing structures
US7492172B2 (en) 2003-05-23 2009-02-17 Cascade Microtech, Inc. Chuck for holding a device under test

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7138813B2 (en) 1999-06-30 2006-11-21 Cascade Microtech, Inc. Probe station thermal chuck with shielding for capacitive current
US7355420B2 (en) 2001-08-21 2008-04-08 Cascade Microtech, Inc. Membrane probing system
US7492175B2 (en) 2001-08-21 2009-02-17 Cascade Microtech, Inc. Membrane probing system
US7492172B2 (en) 2003-05-23 2009-02-17 Cascade Microtech, Inc. Chuck for holding a device under test
US7876115B2 (en) 2003-05-23 2011-01-25 Cascade Microtech, Inc. Chuck for holding a device under test
US7420381B2 (en) 2004-09-13 2008-09-02 Cascade Microtech, Inc. Double sided probing structures
US8013623B2 (en) 2004-09-13 2011-09-06 Cascade Microtech, Inc. Double sided probing structures

Also Published As

Publication number Publication date
JPS5242476U (ko) 1977-03-25

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