JPS5242476U - - Google Patents

Info

Publication number
JPS5242476U
JPS5242476U JP12904675U JP12904675U JPS5242476U JP S5242476 U JPS5242476 U JP S5242476U JP 12904675 U JP12904675 U JP 12904675U JP 12904675 U JP12904675 U JP 12904675U JP S5242476 U JPS5242476 U JP S5242476U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12904675U
Other languages
Japanese (ja)
Other versions
JPS567439Y2 (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12904675U priority Critical patent/JPS567439Y2/ja
Publication of JPS5242476U publication Critical patent/JPS5242476U/ja
Application granted granted Critical
Publication of JPS567439Y2 publication Critical patent/JPS567439Y2/ja
Expired legal-status Critical Current

Links

JP12904675U 1975-09-20 1975-09-20 Expired JPS567439Y2 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12904675U JPS567439Y2 (ko) 1975-09-20 1975-09-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12904675U JPS567439Y2 (ko) 1975-09-20 1975-09-20

Publications (2)

Publication Number Publication Date
JPS5242476U true JPS5242476U (ko) 1977-03-25
JPS567439Y2 JPS567439Y2 (ko) 1981-02-18

Family

ID=28609377

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12904675U Expired JPS567439Y2 (ko) 1975-09-20 1975-09-20

Country Status (1)

Country Link
JP (1) JPS567439Y2 (ko)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6445202B1 (en) 1999-06-30 2002-09-03 Cascade Microtech, Inc. Probe station thermal chuck with shielding for capacitive current
WO2003052435A1 (en) 2001-08-21 2003-06-26 Cascade Microtech, Inc. Membrane probing system
US7492172B2 (en) 2003-05-23 2009-02-17 Cascade Microtech, Inc. Chuck for holding a device under test
US7420381B2 (en) 2004-09-13 2008-09-02 Cascade Microtech, Inc. Double sided probing structures

Also Published As

Publication number Publication date
JPS567439Y2 (ko) 1981-02-18

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