JPS5672464U - - Google Patents
Info
- Publication number
- JPS5672464U JPS5672464U JP15495179U JP15495179U JPS5672464U JP S5672464 U JPS5672464 U JP S5672464U JP 15495179 U JP15495179 U JP 15495179U JP 15495179 U JP15495179 U JP 15495179U JP S5672464 U JPS5672464 U JP S5672464U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15495179U JPS594442Y2 (en) | 1979-11-08 | 1979-11-08 | scanning electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15495179U JPS594442Y2 (en) | 1979-11-08 | 1979-11-08 | scanning electron microscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5672464U true JPS5672464U (en) | 1981-06-15 |
| JPS594442Y2 JPS594442Y2 (en) | 1984-02-08 |
Family
ID=29385452
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15495179U Expired JPS594442Y2 (en) | 1979-11-08 | 1979-11-08 | scanning electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS594442Y2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58193453U (en) * | 1982-06-14 | 1983-12-22 | 株式会社明石製作所 | Backscattered electron detection device in electron beam equipment |
| WO2016088249A1 (en) * | 2014-12-05 | 2016-06-09 | 株式会社日立ハイテクノロジーズ | Charged particle beam device, and observation method using charged particle beam device |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6406032B2 (en) * | 2015-01-27 | 2018-10-17 | 新日鐵住金株式会社 | Sample stage and electron microscope equipped with the same |
| JP6790559B2 (en) * | 2016-08-02 | 2020-11-25 | 日本製鉄株式会社 | Sample table and electron microscope equipped with it |
-
1979
- 1979-11-08 JP JP15495179U patent/JPS594442Y2/en not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58193453U (en) * | 1982-06-14 | 1983-12-22 | 株式会社明石製作所 | Backscattered electron detection device in electron beam equipment |
| WO2016088249A1 (en) * | 2014-12-05 | 2016-06-09 | 株式会社日立ハイテクノロジーズ | Charged particle beam device, and observation method using charged particle beam device |
| JPWO2016088249A1 (en) * | 2014-12-05 | 2017-09-21 | 株式会社日立ハイテクノロジーズ | Charged particle beam apparatus and observation method using charged particle beam apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS594442Y2 (en) | 1984-02-08 |