JPS5663813A - Liquid silicon manufacture and apparatus therefor - Google Patents
Liquid silicon manufacture and apparatus thereforInfo
- Publication number
- JPS5663813A JPS5663813A JP13531879A JP13531879A JPS5663813A JP S5663813 A JPS5663813 A JP S5663813A JP 13531879 A JP13531879 A JP 13531879A JP 13531879 A JP13531879 A JP 13531879A JP S5663813 A JPS5663813 A JP S5663813A
- Authority
- JP
- Japan
- Prior art keywords
- apparatus therefor
- liquid silicon
- silicon manufacture
- manufacture
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Silicon Compounds (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13531879A JPS5663813A (en) | 1979-10-22 | 1979-10-22 | Liquid silicon manufacture and apparatus therefor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13531879A JPS5663813A (en) | 1979-10-22 | 1979-10-22 | Liquid silicon manufacture and apparatus therefor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5663813A true JPS5663813A (en) | 1981-05-30 |
Family
ID=15148934
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13531879A Pending JPS5663813A (en) | 1979-10-22 | 1979-10-22 | Liquid silicon manufacture and apparatus therefor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5663813A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6861144B2 (en) | 2000-05-11 | 2005-03-01 | Tokuyama Corporation | Polycrystalline silicon and process and apparatus for producing the same |
-
1979
- 1979-10-22 JP JP13531879A patent/JPS5663813A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6861144B2 (en) | 2000-05-11 | 2005-03-01 | Tokuyama Corporation | Polycrystalline silicon and process and apparatus for producing the same |
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