Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co LtdfiledCriticalToshiba Corp
Priority to JP13938079ApriorityCriticalpatent/JPS5663738A/ja
Publication of JPS5663738ApublicationCriticalpatent/JPS5663738A/ja
H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
H01J9/02—Manufacture of electrodes or electrode systems
Landscapes
Engineering & Computer Science
(AREA)
Manufacturing & Machinery
(AREA)
JP13938079A1979-10-301979-10-30Manufacture of flat mask
PendingJPS5663738A
(en)